Abstract

The combination of high temperature stable electro­nics with micromachining is a powerful means to de­velop a variety of intelligent sensors. Especially in the GaAs/AlGaAs material system all advantages fit to­gether to realize micromachined sensors with integrated high temperature electronics. The technology includes new ohmic and Schottky contacts with high stability at increased ambient temperature. A thermal sensor is pre­sented that can detect total pressure, gas type as well as gas velocities.