Methodology to assess the reliability behavior of RF-MEMS

Dubuc, D. ; Van Spengen, Merlijn ; Melle, Samuel ; De Wolf, Ingrid ; Mertens, Robert ; Pons, Patrick ; Grenier, Katia ; Plana, Robert (2004) Methodology to assess the reliability behavior of RF-MEMS. In: Gallium Arsenide applications symposium. GAAS 2004, 11—12 Ottobre, Amsterdam.
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Abstract

This paper reports on the investigation of the main phenomenon which limits the lifetime of capacitive RF MEMS : dielectric charging. To understand this effect, we have developed specific test set which measures the electrical (at both low and microwave frequencies) and electromechanical performances of RF MEMS to investigate their reliability. Several experiments have thus been performed such as DC bias stress and cycling under different actuation waveforms and environment conditions. These tests have shown that the dielectric charging creates a drift of the threshold voltages and we propose an appropriate figure of merit regarding the lifetime of capacitive RF-MEMS and a key parameter to determine the type of the failure which occurs.

Abstract
Tipologia del documento
Documento relativo ad un convegno o altro evento (Atto)
Autori
AutoreAffiliazioneORCID
Dubuc, D.
Van Spengen, Merlijn
Melle, Samuel
De Wolf, Ingrid
Mertens, Robert
Pons, Patrick
Grenier, Katia
Plana, Robert
Settori scientifico-disciplinari
DOI
Data di deposito
16 Giu 2005
Ultima modifica
17 Feb 2016 14:16
URI

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