Characterization of various shaped 5 GHz TFBARs based on 3D full-wave modeling

Kim, Yong-Dae ; Sunwoo, Kook-Hyun ; Choa, Sung-Hoon ; Kim, Duck-Hwan ; Song, In-Sang ; Yook, Jong-Gwan (2005) Characterization of various shaped 5 GHz TFBARs based on 3D full-wave modeling. In: Gallium Arsenide applications symposium. GAAS 2005, 3-7 ottobre 2005, Parigi.
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Abstract

In this paper, three dimensional finite element method is used for the analysis of thin film bulk acoustic wave resonator (TFBAR) at 5GHz. The TFBARisplaced on thin membrane after removal of substrate materialfor the suppression of loading effects and threedifferent geometries (rectangular, polygonal and circular)are implemented and modeled. The size of fabricated TFBAR are from100x100um2 to 200x200 um2 and full-wave modeled results are compared with the measurement.It is found that the modeled and measured results agree within 1% in terms of series and parallel resonant frequencies. Furthermore, the different shapes of TFBAR revealed slightly different bandwidth characteristics, whichis defined on frequency spacing between the series and parallel resonant frequencies.The another goal of this workis to study the variation of the size of resonator on how affects the performance of TFBAR. As the size of resonator incease, the electrical impedance of TFBAR decrease at theresonant frequencies and out of resonant frequencies.Thesephenomenacontributeto improve the effects of theattenuations of TFBAR filter in stop-band to some degree.

Abstract
Tipologia del documento
Documento relativo ad un convegno o altro evento (Atto)
Autori
AutoreAffiliazioneORCID
Kim, Yong-Dae
Sunwoo, Kook-Hyun
Choa, Sung-Hoon
Kim, Duck-Hwan
Song, In-Sang
Yook, Jong-Gwan
Settori scientifico-disciplinari
DOI
Data di deposito
01 Dic 2005
Ultima modifica
17 Feb 2016 14:17
URI

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