RF MEMS: Silicon micro-mechanical capacitive structures

Bazin, G. ; Gilles, J.P. ; Crozat, P. ; Megherbi, Souhil (2000) RF MEMS: Silicon micro-mechanical capacitive structures. In: Gallium Arsenide applications symposium. GAAS 2000, 2-6 october 2000, Paris.
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Abstract

The general study is dedicated to Wireless Sensor Networks. The idea is to associate micro-mechanical and microwave communication functions to exchange information between a remote sensor and a base station [1]. A specific part of this project concerns the conception, realisation, and characterisation of a passive microwave frequency shifter used for back-modulation around 2 GHz. The interesting point was to develop this function with an integrated silicon micro-mechanical rotating structure. The paper describes the prototype of the RF MEMS already developed in ESIEE laboratory. And we insist on the microwave measurements performed and the associated equivalent models.

Abstract
Tipologia del documento
Documento relativo ad un convegno o altro evento (Poster)
Autori
AutoreAffiliazioneORCID
Bazin, G.
Gilles, J.P.
Crozat, P.
Megherbi, Souhil
Parole chiave
wireless sensor networks, RF MEMS, electrostatic actuation, microwave frequency shifter.
Settori scientifico-disciplinari
DOI
Data di deposito
17 Giu 2004
Ultima modifica
17 Feb 2016 13:46
URI

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