Micromachined Strip Line with SU-8 as the Dielectric

Osorio, Ricardo ; Klein, Mona ; Massler, H. ; Korvink, Jan G. (2003) Micromachined Strip Line with SU-8 as the Dielectric. In: Gallium Arsenide applications symposium. GAAS 2003, 6-10 October 2003, Munich.
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For the first time this paper presents strip lines fabricated using SU-8 as the dielectric material. It shows the complete fabrication process of micromachined strip lines with a total height of as well as their characterization by on-wafer S-parameter measurements with frequencies up to the mm-wave range. Strip lines with a a strip thickness of , a line length of 3mm and variations of strip width between 6 and were manufactured and measured. The characteristic impedance, the phase constant, the phase velocity and the attenuation onstant of the lines were determined from the measured S-parameters. Characteristic impedance values between and were measured and on the strip line an attenuation constant of and at and respectively were determined. Since the fabricated strip line is totally shielded and its dielectric consists solely of SU-8, determination of the relative dielectric constant and the loss tangent of SU-8 was performed from microwave measurements on the strip lines. A relative dielectric constant of 1 and a loss tangent of for SU-8 was determined.

Document type
Conference or Workshop Item (Poster)
Osorio, Ricardo
Klein, Mona
Massler, H.
Korvink, Jan G.
Deposit date
17 Jun 2004
Last modified
17 Feb 2016 13:55

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