Abstract

This paper reports on the electrical properties of Au-oxide-n-InP structures obtained by oxygen plasma oxidation and those oxidised by air. A discussion on the evolution of the series resistance according to the temperature is presented. The values of the electrical parameters are obtained with a modified current-voltagetemperature model. The results obtained establish the relationship between the series resistance and the temperature for the Au - oxide - n-InP structures obtained by oxygen plasma oxidation and those oxidised by air. The values of this parameter in the Au-oxide-n-InP structures are in good agreement with those published in the literature.