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Clausen, M.C. ; McMonagle, J.
(2005)
Advanced manufacturing techniques for next generation power FET technology.
In: Gallium Arsenide applications symposium. GAAS 2005, 3-7 ottobre 2005, Parigi.
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Abstract
The development and incorporation of an evaporated airbridge technology into an established power pHEMT device is described. Advantages of this technology over a conventional plated technology are discussed. Use of this technology has resulted in improvements to the process flow in terms of reduced complexity and cycle time. Improvements in uniformity and reduced feature size have enabled the use of an automated visual inspection capability to reliably differentiate good and bad die.
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