Abstract

The analysis of fatigue behavior for polycrystalline gold microbridges is the aim of this paper. A description of the fatigue phenomenon for these elementary structures is presented. It is obtained by combining elementary in situ test benches of varying dimensions and cyclic actuation; in the same way, the debugging-time is determined according to the design. Test benches have been developed allowing performing bending fatigue tests of polycrystalline gold structural layers, describing the fatigue phenomenon and obtaining a constant debugging-time, whatever the excitation frequency and the beams length.