Advanced manufacturing techniques for next generation power FET technology

Clausen, M.C. ; McMonagle, J. (2005) Advanced manufacturing techniques for next generation power FET technology. In: Gallium Arsenide applications symposium. GAAS 2005, 3-7 ottobre 2005, Parigi.
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Abstract

The development and incorporation of an evaporated airbridge technology into an established power pHEMT device is described. Advantages of this technology over a conventional plated technology are discussed. Use of this technology has resulted in improvements to the process flow in terms of reduced complexity and cycle time. Improvements in uniformity and reduced feature size have enabled the use of an automated visual inspection capability to reliably differentiate good and bad die.

Abstract
Document type
Conference or Workshop Item (Paper)
Creators
CreatorsAffiliationORCID
Clausen, M.C.
McMonagle, J.
Subjects
DOI
Deposit date
15 Feb 2006
Last modified
17 Feb 2016 14:22
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