Microwave Absorptive MEMS Switches

Tan, Guan-Leng ; Rebeiz, Gabriel M. (2000) Microwave Absorptive MEMS Switches. In: Gallium Arsenide applications symposium. GAAS 2000, 2-6 october 2000, Paris.
Full text available as:
[thumbnail of EuMC_2_2.pdf]
Preview
PDF
Download (249kB) | Preview

Abstract

This paper describes the design and performance of a 30 GHz CPW SPST absorptive MEMS switch based on silicon surface micromachining technology.The MEMS switch is implemented using capacitive shun bridges with fixed-fixed beams.A return loss of better than 15 dB and an insertion loss of 0.8-1.0 dB is achieved in the up-state position.The return loss is better than 20 dB and the isolation is 25-30 dB at 30 GHz in the down-state position.Potential application areas include switch matrix communication systems.

Abstract
Document type
Conference or Workshop Item (Paper)
Creators
CreatorsAffiliationORCID
Tan, Guan-Leng
Rebeiz, Gabriel M.
Subjects
DOI
Deposit date
17 Jun 2004
Last modified
17 Feb 2016 13:43
URI

Other metadata

Downloads

Downloads

Staff only: View the document

^