Microsystems by Bulk micromachining

Esashi, M. (2000) Microsystems by Bulk micromachining. In: Gallium Arsenide applications symposium. GAAS 2000, 2-6 october 2000, Paris.
Full text available as:
[thumbnail of EuMC_4_1.pdf]
Preview
PDF
Download (873kB) | Preview

Abstract

Deep RIE (Reactive Ion Etching) was developed not only for silicon but also for other materials and silicon microstructures made by the deep RIE was used as molds for making ceramic microstructures. Packaged micro mechanical sensors as pressure sensors and electrostatically levitating micro motors for gyroscope have been developed. Microprobes are fabricated for future data storage devices. Energy dissipation of resonating thin cantilever was studied for large Q factor required for highly sensitive resonating sensors. Active catheters which move like snakes in blood vessel and sensors for the catheter have been studied for the purpose of minimal invasive medicine.

Abstract
Document type
Conference or Workshop Item (Paper)
Creators
CreatorsAffiliationORCID
Esashi, M.
Subjects
DOI
Deposit date
17 Jun 2004
Last modified
17 Feb 2016 13:44
URI

Other metadata

Downloads

Downloads

Staff only: View the document

^