Marcelli, Romolo ; Dragoman, M. ; Neculoiu, Dan ; Giacomozzi, Flavio ; Muller, Alexandru ; Nitescu, N.
(2001)
38 GHz Antennas on Micromachined Silicon Substrates.
In: Gallium Arsenide applications symposium. GAAS 2001, 24-28 september 2001, London.
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Abstract
A new configuration of a double folded double slot CPW feed micromachined antenna array was realized on a 1.5 µm thin three-layer dielectric membrane fabricated on a silicon substrate. The antenna was designed for an operating frequency of 38 GHz, and the double folded configuration was used for minimizing the membrane extension.
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