Muller, Alexandru ; Konstantinidis, George ; Neculoiu, Dan ; Plana, Robert
(2003)
GaAs MEMS for Millimeter Wave Communications.
In: Gallium Arsenide applications symposium. GAAS 2003, 6-10 October 2003, Munich.
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Abstract
The paper presents the authors ’ contributions towards the development of millimeter wave circuits based on GaAs micromachining.The manufacturing and characterization of different type of millimeter wave GaAs membrane supported filter structures is presented.A fully monolithically integrated millimeter wave receiver module,having the antenna as well as the detecting Schottky diode on the same GaAs membrane is also presented.
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