Vorobiev, A. ; Deleniv, A. ; Talanov, V. ; Gevorgian, S.
(2002)
A Simple Parallel-Plate Resonator Technique for Microwave. Characterization of Thin Resistive Films.
In: Gallium Arsenide applications symposium. GAAS 2002, 23-27 september 2002, Milano.
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Abstract
A parallel-plate resonator method is proposed for non-destructive characterisation of resistive films used in microwave integrated circuits. A slot made in one of the plates is used to measure surface impedance of a reference film and film under test. The surface impedance of the film under test is extract from these two measurements using a simple procedure. X-band experimental verification is given for a number of resistive films.
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