A Simple Parallel-Plate Resonator Technique for Microwave. Characterization of Thin Resistive Films

Vorobiev, A. ; Deleniv, A. ; Talanov, V. ; Gevorgian, S. (2002) A Simple Parallel-Plate Resonator Technique for Microwave. Characterization of Thin Resistive Films. In: Gallium Arsenide applications symposium. GAAS 2002, 23-27 september 2002, Milano.

Salva citazione

Citato da

Full text disponibile come:

Anteprima

Documento PDF
Download (76kB) | Anteprima

Abstract

A parallel-plate resonator method is proposed for non-destructive characterisation of resistive films used in microwave integrated circuits. A slot made in one of the plates is used to measure surface impedance of a reference film and film under test. The surface impedance of the film under test is extract from these two measurements using a simple procedure. X-band experimental verification is given for a number of resistive films.

Abstract

Tipologia del documento

Documento relativo ad un convegno o altro evento (Atto)

Autori