IC compatible MEMS technology

Grenier, K. ; Mazenq, L. ; Dubuc, D. ; Bouchriha, F. ; Coccetti, F. ; Ojefors, E. ; Lindberg, P. ; Rydberg, A. ; Berntgen, J. ; Rabe, W.J. ; Sonmez, E. ; Abele, P. ; Schumacher, H. ; Plana, R. (2005) IC compatible MEMS technology. In: Gallium Arsenide applications symposium. GAAS 2005, 3-7 ottobre 2005, Parigi.
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Abstract

This paper deals with an Integrated Circuits (ICs) compatible MEMS technology, which is used to elaborate an ultra compact RF communication module centered at 24GHz. This technology uses conventional equipments and is in adequation with millimeterwave applications. A compatibility test protocol has consequently been defined in order to check that each technological step does not degrade the SiGe circuits’ performances. Finally, the realized demonstrator present a total surface of only 9mm².

Abstract
Document type
Conference or Workshop Item (Paper)
Creators
CreatorsAffiliationORCID
Grenier, K.
Mazenq, L.
Dubuc, D.
Bouchriha, F.
Coccetti, F.
Ojefors, E.
Lindberg, P.
Rydberg, A.
Berntgen, J.
Rabe, W.J.
Sonmez, E.
Abele, P.
Schumacher, H.
Plana, R.
Subjects
DOI
Deposit date
15 Feb 2006
Last modified
17 Feb 2016 14:31
URI

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