Machác, Petr ; Žilka, Martin ; Výborný, ZdeneČk
(2003)
Pt/GaAs side wall Schottky diode.
In: Gallium Arsenide applications symposium. GAAS 2003, 6-10 October 2003, Munich.
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Abstract
This contribution deals with the technological realization of a special GaAs Schottky diode,based on the side-by-side technique.This is a structure,where one of the dimensions of the Schottky contact is given by the thickness of the epitaxial layer on which the structure is fabricated.We reached the value of cut-off frequency 21 GHz;this is in discrepancy with the theoretically predicted parameters.The contribution describes the technological improvements,which should lead to increase limiting frequency through the changing the structure morphology.
Abstract