Reliability of RF-MEMS

Gaddi, Roberto ; Gnudi, Antonio ; Tazzoli, Augusto ; Meneghesso, Gaudenzio ; Zanoni, Enrico (2005) Reliability of RF-MEMS. In: Gallium Arsenide applications symposium. GAAS 2005, 3-7 ottobre 2005, Parigi.

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Abstract

The continuously evolving MEMS technology for RF/microwave applications poses issues regarding new reliability and lifetime estimation. We will overview the most important degradation mechanisms concerning capacitive and ohmic RF-MEMS devices and their effects on the device lifetime. Preliminary results will also be given on ElectroStatic Discharge effects on ohmic shunt switches adopting a Transmission Line Pulse stress technique.

Abstract

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