Reliability of RF-MEMS

Gaddi, Roberto ; Gnudi, Antonio ; Tazzoli, Augusto ; Meneghesso, Gaudenzio ; Zanoni, Enrico (2005) Reliability of RF-MEMS. In: Gallium Arsenide applications symposium. GAAS 2005, 3-7 ottobre 2005, Parigi.
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Abstract

The continuously evolving MEMS technology for RF/microwave applications poses issues regarding new reliability and lifetime estimation. We will overview the most important degradation mechanisms concerning capacitive and ohmic RF-MEMS devices and their effects on the device lifetime. Preliminary results will also be given on ElectroStatic Discharge effects on ohmic shunt switches adopting a Transmission Line Pulse stress technique.

Abstract
Document type
Conference or Workshop Item (Paper)
Creators
CreatorsAffiliationORCID
Gaddi, Roberto
Gnudi, Antonio
Tazzoli, Augusto
Meneghesso, Gaudenzio
Zanoni, Enrico
Subjects
DOI
Deposit date
15 Feb 2006
Last modified
17 Feb 2016 14:30
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