Integration Aspects of RF-MEMS Technologies

Lisec, T. ; Wagner, B. (2005) Integration Aspects of RF-MEMS Technologies. In: Gallium Arsenide applications symposium. GAAS 2005, 3-7 ottobre 2005, Parigi.

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Abstract

This paper presents an overview about existing fabrication and packaging solutions for RF MEMS switches with regard to an integration with other passive or active devices. Achievements and problems are discussed from a technological point of view.

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