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Pasquali, J.P.
(1992)
Reliability evaluation of the D07A process from Philips microwave Limeil.
In: Gallium Arsenide Applications Symposium. GAAS 1992, 27-29 April 1992, Noordwijk, The Netherlands.
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Abstract
The results of the reliability evaluation of the D07A process from the Philips Microwave Limeil Foundry are presented. First the parametric evaluation of the discrete elements is described, showing that the most sensitive element is the diode., due to a surface degradation in the access areas, Then the reproducibility of the D07A process is demonstrated on 10 wafers coming from 4 different batches.
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