Planar effects in MIM capacitors

Giannini, F. ; Bartolucci, Giancarlo ; Limiti, E. (1992) Planar effects in MIM capacitors. In: Gallium Arsenide Applications Symposium. GAAS 1992, 27-29 April 1992, Noordwijk, The Netherlands.

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Abstract

Planar effects in MIM capacitors have been investigated, and a novel equivalent circuit has been derived, which allows to take into account any port misalignment.

Abstract

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