Integrated Millimeter-Wave Silicon Micromachined Filters

Blondy, P. ; Baleras, F. ; Cros, D. ; Massit, C. ; Guillon, P. ; Zanchi, C. ; Lapierre, L. ; Sombrin, J. (2000) Integrated Millimeter-Wave Silicon Micromachined Filters. In: Gallium Arsenide applications symposium. GAAS 2000, 2-6 october 2000, Paris.
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Abstract

This paper describes the design and the fabrication of a new type of millimeter-wave micromachined band pass filters, using silicon waveguides. The main interest of these components is their ability to be integrated along with other MMICs using flip chip bonding techniques. The micromachining fabrication technique allows to maintain very good fabrication tolerances, while the resulting filters are very compact. The design methodology is presented along with two examples of two and four pole filters at 42 GHz. applied to these filters and at last simulation results on 2 and 4 pole bandpass filters.

Abstract
Tipologia del documento
Documento relativo ad un convegno o altro evento (Atto)
Autori
AutoreAffiliazioneORCID
Blondy, P.
Baleras, F.
Cros, D.
Massit, C.
Guillon, P.
Zanchi, C.
Lapierre, L.
Sombrin, J.
Settori scientifico-disciplinari
DOI
Data di deposito
17 Giu 2004
Ultima modifica
17 Feb 2016 13:44
URI

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