Bulk Silicon Micro-Machined MEM Switches For Millimeter-wave Applications

Grenier, K. ; Pons, P. ; Plana, R. ; Graffeuil, J. (2001) Bulk Silicon Micro-Machined MEM Switches For Millimeter-wave Applications. In: Gallium Arsenide applications symposium. GAAS 2001, 24-28 september 2001, London.
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Abstract

This paper deals with the realization of micro-electro-mechanical (MEM) components dedicated to microwave and millimeter-wave applications and focuses on the advantage of using bulk silicon micro-machining. The silicon substrate etching benefits have been demonstrated through both electromagnetic simulations and measurements of a single MEM switch. Important improvements in term of insertion loss and isolation have been obtained. Further developments in term of distributed switches are addressed.

Abstract
Tipologia del documento
Documento relativo ad un convegno o altro evento (Atto)
Autori
AutoreAffiliazioneORCID
Grenier, K.
Pons, P.
Plana, R.
Graffeuil, J.
Settori scientifico-disciplinari
DOI
Data di deposito
17 Giu 2004
Ultima modifica
17 Feb 2016 13:46
URI

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