Bulk Silicon Micro-Machined MEM Switches For Millimeter-wave Applications

Grenier, K. ; Pons, P. ; Plana, R. ; Graffeuil, J. (2001) Bulk Silicon Micro-Machined MEM Switches For Millimeter-wave Applications. In: Gallium Arsenide applications symposium. GAAS 2001, 24-28 september 2001, London.
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Abstract

This paper deals with the realization of micro-electro-mechanical (MEM) components dedicated to microwave and millimeter-wave applications and focuses on the advantage of using bulk silicon micro-machining. The silicon substrate etching benefits have been demonstrated through both electromagnetic simulations and measurements of a single MEM switch. Important improvements in term of insertion loss and isolation have been obtained. Further developments in term of distributed switches are addressed.

Abstract
Document type
Conference or Workshop Item (Paper)
Creators
CreatorsAffiliationORCID
Grenier, K.
Pons, P.
Plana, R.
Graffeuil, J.
Subjects
DOI
Deposit date
17 Jun 2004
Last modified
17 Feb 2016 13:46
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