Grenier, K. ; Pons, P. ; Plana, R. ; Graffeuil, J.
(2001)
Bulk Silicon Micro-Machined MEM Switches For Millimeter-wave Applications.
In: Gallium Arsenide applications symposium. GAAS 2001, 24-28 september 2001, London.
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Abstract
This paper deals with the realization of micro-electro-mechanical (MEM) components dedicated to microwave and millimeter-wave applications and focuses on the advantage of using bulk silicon micro-machining. The silicon substrate etching benefits have been demonstrated through both electromagnetic simulations and measurements of a single MEM switch. Important improvements in term of insertion loss and isolation have been obtained. Further developments in term of distributed switches are addressed.
Abstract