Fumi, F. ; Lanzieri, C. ; Lupano, D. ; Negri, G. ; Peroni, M. ; Cetronio, A.
(1996)
Multi-function self-aligned gate (MSAG) process for low cost, increased performance GaAs integrated circuits.
In: Gallium Arsenide Applications Symposium. GAAS 1996, 5-6 June 1996, Paris, France.
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Abstract
We report on the realisation of an original SAGFET technology, presenting d.c. and r.f. measurements on discrete devices as a demonstration of the validity of said technology. Even though at an initial stage, the low-noise, control and power devices, simultaneously fabricated on the same wafer, are comparable with the more mature recessed-gate technology, yielding NF better than 2 dB and Pout better than 500 mW/mm at 12 GHz. As an example of the potentiality of this technology a prototype Tx/Rx chip is also presented.
Abstract