Multi-function self-aligned gate (MSAG) process for low cost, increased performance GaAs integrated circuits

Fumi, F. ; Lanzieri, C. ; Lupano, D. ; Negri, G. ; Peroni, M. ; Cetronio, A. (1996) Multi-function self-aligned gate (MSAG) process for low cost, increased performance GaAs integrated circuits. In: Gallium Arsenide Applications Symposium. GAAS 1996, 5-6 June 1996, Paris, France.
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Abstract

We report on the realisation of an original SAGFET technology, presenting d.c. and r.f. measurements on discrete devices as a demonstration of the validity of said technology. Even though at an initial stage, the low-noise, control and power devices, simultaneously fabricated on the same wafer, are comparable with the more mature recessed-gate technology, yielding NF better than 2 dB and Pout better than 500 mW/mm at 12 GHz. As an example of the potentiality of this technology a prototype Tx/Rx chip is also presented.

Abstract
Document type
Conference or Workshop Item (Paper)
Creators
CreatorsAffiliationORCID
Fumi, F.
Lanzieri, C.
Lupano, D.
Negri, G.
Peroni, M.
Cetronio, A.
Subjects
DOI
Deposit date
16 Feb 2006
Last modified
17 Feb 2016 14:37
URI

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